@article{6020,
  author       = {Haefliger, D. and Cahill, Brian and Stemmer, A.},
  issn         = {0167-9317},
  journal      = {Microelectronic Engineering},
  pages        = {473--478},
  publisher    = {Elsevier BV},
  title        = {{Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water}},
  doi          = {10.1016/S0167-9317(03)00103-5},
  volume       = {67-68},
  year         = {2003},
}