[{"publication":"Microelectronic Engineering","publication_status":"published","user_id":"220548","publication_identifier":{"issn":["0167-9317"]},"type":"journal_article","volume":"67-68","date_created":"2025-06-27T11:24:53Z","title":"Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water","language":[{"iso":"eng"}],"_id":"6020","year":"2003","date_updated":"2026-03-17T15:29:25Z","page":"473-478","publisher":"Elsevier BV","doi":"10.1016/S0167-9317(03)00103-5","status":"public","citation":{"chicago":"Haefliger, D., Brian Cahill, and A. Stemmer. “Rapid Prototyping of Micro-Electrodes on Glass and Polymers by Laser-Assisted Corrosion of Aluminum Films in Water.” <i>Microelectronic Engineering</i> 67–68 (2003): 473–78. <a href=\"https://doi.org/10.1016/S0167-9317(03)00103-5\">https://doi.org/10.1016/S0167-9317(03)00103-5</a>.","short":"D. Haefliger, B. Cahill, A. Stemmer, Microelectronic Engineering 67–68 (2003) 473–478.","ama":"Haefliger D, Cahill B, Stemmer A. Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. <i>Microelectronic Engineering</i>. 2003;67-68:473-478. doi:<a href=\"https://doi.org/10.1016/S0167-9317(03)00103-5\">10.1016/S0167-9317(03)00103-5</a>","mla":"Haefliger, D., et al. “Rapid Prototyping of Micro-Electrodes on Glass and Polymers by Laser-Assisted Corrosion of Aluminum Films in Water.” <i>Microelectronic Engineering</i>, vol. 67–68, Elsevier BV, 2003, pp. 473–78, doi:<a href=\"https://doi.org/10.1016/S0167-9317(03)00103-5\">10.1016/S0167-9317(03)00103-5</a>.","ieee":"D. Haefliger, B. Cahill, and A. Stemmer, “Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water,” <i>Microelectronic Engineering</i>, vol. 67–68, pp. 473–478, 2003.","apa":"Haefliger, D., Cahill, B., &#38; Stemmer, A. (2003). Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. <i>Microelectronic Engineering</i>, <i>67</i>–<i>68</i>, 473–478. <a href=\"https://doi.org/10.1016/S0167-9317(03)00103-5\">https://doi.org/10.1016/S0167-9317(03)00103-5</a>","bibtex":"@article{Haefliger_Cahill_Stemmer_2003, title={Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water}, volume={67–68}, DOI={<a href=\"https://doi.org/10.1016/S0167-9317(03)00103-5\">10.1016/S0167-9317(03)00103-5</a>}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Haefliger, D. and Cahill, Brian and Stemmer, A.}, year={2003}, pages={473–478} }","alphadin":"<span style=\"font-variant:small-caps;\">Haefliger, D.</span> ; <span style=\"font-variant:small-caps;\">Cahill, Brian</span> ; <span style=\"font-variant:small-caps;\">Stemmer, A.</span>: Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. In: <i>Microelectronic Engineering</i> Bd. 67–68, Elsevier BV (2003), S. 473–478"},"author":[{"first_name":"D.","last_name":"Haefliger","full_name":"Haefliger, D."},{"orcid":"0000-0002-7325-5114","full_name":"Cahill, Brian","last_name":"Cahill","first_name":"Brian","orcid_put_code_url":"https://api.orcid.org/v2.0/0000-0002-7325-5114/work/187030960","id":"257249"},{"first_name":"A.","full_name":"Stemmer, A.","last_name":"Stemmer"}]}]