---
_id: '6020'
author:
- first_name: D.
  full_name: Haefliger, D.
  last_name: Haefliger
- first_name: Brian
  full_name: Cahill, Brian
  id: '257249'
  last_name: Cahill
  orcid: 0000-0002-7325-5114
  orcid_put_code_url: https://api.orcid.org/v2.0/0000-0002-7325-5114/work/187030960
- first_name: A.
  full_name: Stemmer, A.
  last_name: Stemmer
citation:
  alphadin: '<span style="font-variant:small-caps;">Haefliger, D.</span> ; <span style="font-variant:small-caps;">Cahill,
    Brian</span> ; <span style="font-variant:small-caps;">Stemmer, A.</span>: Rapid
    prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion
    of aluminum films in water. In: <i>Microelectronic Engineering</i> Bd. 67–68,
    Elsevier BV (2003), S. 473–478'
  ama: Haefliger D, Cahill B, Stemmer A. Rapid prototyping of micro-electrodes on
    glass and polymers by laser-assisted corrosion of aluminum films in water. <i>Microelectronic
    Engineering</i>. 2003;67-68:473-478. doi:<a href="https://doi.org/10.1016/S0167-9317(03)00103-5">10.1016/S0167-9317(03)00103-5</a>
  apa: Haefliger, D., Cahill, B., &#38; Stemmer, A. (2003). Rapid prototyping of micro-electrodes
    on glass and polymers by laser-assisted corrosion of aluminum films in water.
    <i>Microelectronic Engineering</i>, <i>67</i>–<i>68</i>, 473–478. <a href="https://doi.org/10.1016/S0167-9317(03)00103-5">https://doi.org/10.1016/S0167-9317(03)00103-5</a>
  bibtex: '@article{Haefliger_Cahill_Stemmer_2003, title={Rapid prototyping of micro-electrodes
    on glass and polymers by laser-assisted corrosion of aluminum films in water},
    volume={67–68}, DOI={<a href="https://doi.org/10.1016/S0167-9317(03)00103-5">10.1016/S0167-9317(03)00103-5</a>},
    journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Haefliger,
    D. and Cahill, Brian and Stemmer, A.}, year={2003}, pages={473–478} }'
  chicago: 'Haefliger, D., Brian Cahill, and A. Stemmer. “Rapid Prototyping of Micro-Electrodes
    on Glass and Polymers by Laser-Assisted Corrosion of Aluminum Films in Water.”
    <i>Microelectronic Engineering</i> 67–68 (2003): 473–78. <a href="https://doi.org/10.1016/S0167-9317(03)00103-5">https://doi.org/10.1016/S0167-9317(03)00103-5</a>.'
  ieee: D. Haefliger, B. Cahill, and A. Stemmer, “Rapid prototyping of micro-electrodes
    on glass and polymers by laser-assisted corrosion of aluminum films in water,”
    <i>Microelectronic Engineering</i>, vol. 67–68, pp. 473–478, 2003.
  mla: Haefliger, D., et al. “Rapid Prototyping of Micro-Electrodes on Glass and Polymers
    by Laser-Assisted Corrosion of Aluminum Films in Water.” <i>Microelectronic Engineering</i>,
    vol. 67–68, Elsevier BV, 2003, pp. 473–78, doi:<a href="https://doi.org/10.1016/S0167-9317(03)00103-5">10.1016/S0167-9317(03)00103-5</a>.
  short: D. Haefliger, B. Cahill, A. Stemmer, Microelectronic Engineering 67–68 (2003)
    473–478.
date_created: 2025-06-27T11:24:53Z
date_updated: 2026-03-17T15:29:25Z
doi: 10.1016/S0167-9317(03)00103-5
language:
- iso: eng
page: 473-478
publication: Microelectronic Engineering
publication_identifier:
  issn:
  - 0167-9317
publication_status: published
publisher: Elsevier BV
status: public
title: Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted
  corrosion of aluminum films in water
type: journal_article
user_id: '220548'
volume: 67-68
year: '2003'
...