@article{3546,
  author       = {Hamelmann, Frank and Aschentrup, A. and Schmalhorst, J. and Kleineberg, U. and Heinzmann, U. and Dittmar, K. and Jutzi, P.},
  issn         = {1155-4339},
  journal      = {Le Journal de Physique IV},
  number       = {3},
  pages        = {431--436},
  publisher    = {EDP Sciences},
  title        = {{Silicon oxide nanolayers for soft X-ray optics produced by plasma enhanced CVD}},
  doi          = {10.1051/jp4:2001354},
  volume       = {11},
  year         = {2001},
}