@article{6021,
  author       = {Haefliger, Daniel and Cahill, Brian and Stemmer, Andreas},
  issn         = {1568-5632},
  journal      = {Journal of Micromechatronics},
  number       = {3},
  pages        = {215--225},
  publisher    = {Walter de Gruyter GmbH},
  title        = {{Fabrication of aluminum electrodes by water and light}},
  doi          = {10.1163/156856304773954296},
  volume       = {2},
  year         = {2002},
}