---
_id: '6021'
author:
- first_name: Daniel
  full_name: Haefliger, Daniel
  last_name: Haefliger
- first_name: Brian
  full_name: Cahill, Brian
  id: '257249'
  last_name: Cahill
  orcid: 0000-0002-7325-5114
  orcid_put_code_url: https://api.orcid.org/v2.0/0000-0002-7325-5114/work/187030864
- first_name: Andreas
  full_name: Stemmer, Andreas
  last_name: Stemmer
citation:
  alphadin: '<span style="font-variant:small-caps;">Haefliger, Daniel</span> ; <span
    style="font-variant:small-caps;">Cahill, Brian</span> ; <span style="font-variant:small-caps;">Stemmer,
    Andreas</span>: Fabrication of aluminum electrodes by water and light. In: <i>Journal
    of Micromechatronics</i> Bd. 2, Walter de Gruyter GmbH (2002), Nr. 3, S. 215–225'
  ama: Haefliger D, Cahill B, Stemmer A. Fabrication of aluminum electrodes by water
    and light. <i>Journal of Micromechatronics</i>. 2002;2(3):215-225. doi:<a href="https://doi.org/10.1163/156856304773954296">10.1163/156856304773954296</a>
  apa: Haefliger, D., Cahill, B., &#38; Stemmer, A. (2002). Fabrication of aluminum
    electrodes by water and light. <i>Journal of Micromechatronics</i>, <i>2</i>(3),
    215–225. <a href="https://doi.org/10.1163/156856304773954296">https://doi.org/10.1163/156856304773954296</a>
  bibtex: '@article{Haefliger_Cahill_Stemmer_2002, title={Fabrication of aluminum
    electrodes by water and light}, volume={2}, DOI={<a href="https://doi.org/10.1163/156856304773954296">10.1163/156856304773954296</a>},
    number={3}, journal={Journal of Micromechatronics}, publisher={Walter de Gruyter
    GmbH}, author={Haefliger, Daniel and Cahill, Brian and Stemmer, Andreas}, year={2002},
    pages={215–225} }'
  chicago: 'Haefliger, Daniel, Brian Cahill, and Andreas Stemmer. “Fabrication of
    Aluminum Electrodes by Water and Light.” <i>Journal of Micromechatronics</i> 2,
    no. 3 (2002): 215–25. <a href="https://doi.org/10.1163/156856304773954296">https://doi.org/10.1163/156856304773954296</a>.'
  ieee: D. Haefliger, B. Cahill, and A. Stemmer, “Fabrication of aluminum electrodes
    by water and light,” <i>Journal of Micromechatronics</i>, vol. 2, no. 3, pp. 215–225,
    2002.
  mla: Haefliger, Daniel, et al. “Fabrication of Aluminum Electrodes by Water and
    Light.” <i>Journal of Micromechatronics</i>, vol. 2, no. 3, Walter de Gruyter
    GmbH, 2002, pp. 215–25, doi:<a href="https://doi.org/10.1163/156856304773954296">10.1163/156856304773954296</a>.
  short: D. Haefliger, B. Cahill, A. Stemmer, Journal of Micromechatronics 2 (2002)
    215–225.
date_created: 2025-06-27T11:24:54Z
date_updated: 2026-03-17T15:29:25Z
doi: 10.1163/156856304773954296
intvolume: '         2'
issue: '3'
language:
- iso: eng
main_file_link:
- url: https://brill.com/view/journals/jmm/2/3-4/article-p215.xml?rskey=62otks&result=1&ebody=previewPdf-130794
page: 215-225
publication: Journal of Micromechatronics
publication_identifier:
  eissn:
  - 1568-5632
  issn:
  - 1389-2258
publication_status: published
publisher: Walter de Gruyter GmbH
status: public
title: Fabrication of aluminum electrodes by water and light
type: journal_article
user_id: '220548'
volume: 2
year: '2002'
...