---
_id: '3536'
author:
- first_name: Frank
  full_name: Hamelmann, Frank
  id: '208487'
  last_name: Hamelmann
  orcid: 0000-0001-6141-9874
- first_name: A.
  full_name: Wonisch, A.
  last_name: Wonisch
- first_name: W.
  full_name: Hachmann, W.
  last_name: Hachmann
- first_name: U.
  full_name: Heinzmann, U.
  last_name: Heinzmann
citation:
  alphadin: '<span style="font-variant:small-caps;">Hamelmann, Frank</span> ; <span
    style="font-variant:small-caps;">Wonisch, A.</span> ; <span style="font-variant:small-caps;">Hachmann,
    W.</span> ; <span style="font-variant:small-caps;">Heinzmann, U.</span>: Plasma
    Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer
    Single Layers. In: <span style="font-variant:small-caps;">Kassing, R.</span> ;
    <span style="font-variant:small-caps;">Petkov, P.</span> ; <span style="font-variant:small-caps;">Kulisch,
    W.</span> ; <span style="font-variant:small-caps;">Popov, C.</span> (Hrsg.): <i>Functional
    Properties of Nanostructured Materials</i>, <i>NATO Science Series II: Mathematics,
    Physics and Chemistry</i>. Dordrecht : Springer Netherlands, 2006, S. 351–354'
  ama: 'Hamelmann F, Wonisch A, Hachmann W, Heinzmann U. Plasma Assisted Deposition
    of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers.
    In: Kassing R, Petkov P, Kulisch W, Popov C, eds. <i>Functional Properties of
    Nanostructured Materials</i>. NATO Science Series II: Mathematics, Physics and
    Chemistry. Dordrecht: Springer Netherlands; 2006:351-354. doi:<a href="https://doi.org/10.1007/1-4020-4594-8_27">10.1007/1-4020-4594-8_27</a>'
  apa: 'Hamelmann, F., Wonisch, A., Hachmann, W., &#38; Heinzmann, U. (2006). Plasma
    Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer
    Single Layers. In R. Kassing, P. Petkov, W. Kulisch, &#38; C. Popov (Eds.), <i>Functional
    Properties of Nanostructured Materials</i> (pp. 351–354). Dordrecht: Springer
    Netherlands. <a href="https://doi.org/10.1007/1-4020-4594-8_27">https://doi.org/10.1007/1-4020-4594-8_27</a>'
  bibtex: '@inbook{Hamelmann_Wonisch_Hachmann_Heinzmann_2006, place={Dordrecht}, series={NATO
    Science Series II: Mathematics, Physics and Chemistry}, title={Plasma Assisted
    Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer
    Single Layers}, DOI={<a href="https://doi.org/10.1007/1-4020-4594-8_27">10.1007/1-4020-4594-8_27</a>},
    booktitle={Functional Properties of Nanostructured Materials}, publisher={Springer
    Netherlands}, author={Hamelmann, Frank and Wonisch, A. and Hachmann, W. and Heinzmann,
    U.}, editor={Kassing, Rainer and Petkov, Plamen and Kulisch, Wilhelm and Popov,
    CyrilEditors}, year={2006}, pages={351–354}, collection={NATO Science Series II:
    Mathematics, Physics and Chemistry} }'
  chicago: 'Hamelmann, Frank, A. Wonisch, W. Hachmann, and U. Heinzmann. “Plasma Assisted
    Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer
    Single Layers.” In <i>Functional Properties of Nanostructured Materials</i>, edited
    by Rainer Kassing, Plamen Petkov, Wilhelm Kulisch, and Cyril Popov, 351–54. NATO
    Science Series II: Mathematics, Physics and Chemistry. Dordrecht: Springer Netherlands,
    2006. <a href="https://doi.org/10.1007/1-4020-4594-8_27">https://doi.org/10.1007/1-4020-4594-8_27</a>.'
  ieee: 'F. Hamelmann, A. Wonisch, W. Hachmann, and U. Heinzmann, “Plasma Assisted
    Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer
    Single Layers,” in <i>Functional Properties of Nanostructured Materials</i>, R.
    Kassing, P. Petkov, W. Kulisch, and C. Popov, Eds. Dordrecht: Springer Netherlands,
    2006, pp. 351–354.'
  mla: Hamelmann, Frank, et al. “Plasma Assisted Deposition of Tungsten Oxide / Silicon
    Oxide Multilayer Films with Sub-Nanometer Single Layers.” <i>Functional Properties
    of Nanostructured Materials</i>, edited by Rainer Kassing et al., Springer Netherlands,
    2006, pp. 351–54, doi:<a href="https://doi.org/10.1007/1-4020-4594-8_27">10.1007/1-4020-4594-8_27</a>.
  short: 'F. Hamelmann, A. Wonisch, W. Hachmann, U. Heinzmann, in: R. Kassing, P.
    Petkov, W. Kulisch, C. Popov (Eds.), Functional Properties of Nanostructured Materials,
    Springer Netherlands, Dordrecht, 2006, pp. 351–354.'
date_created: 2023-09-01T09:16:56Z
date_updated: 2026-03-17T15:28:46Z
doi: 10.1007/1-4020-4594-8_27
editor:
- first_name: Rainer
  full_name: Kassing, Rainer
  last_name: Kassing
- first_name: Plamen
  full_name: Petkov, Plamen
  last_name: Petkov
- first_name: Wilhelm
  full_name: Kulisch, Wilhelm
  last_name: Kulisch
- first_name: Cyril
  full_name: Popov, Cyril
  last_name: Popov
language:
- iso: eng
main_file_link:
- url: https://link.springer.com/chapter/10.1007/1-4020-4594-8_27
page: 351-354
place: Dordrecht
publication: Functional Properties of Nanostructured Materials
publication_identifier:
  eisbn:
  - 978-1-4020-4594-3
  isbn:
  - 978-1-4020-4595-0
  issn:
  - 1568-2609
publication_status: published
publisher: Springer Netherlands
series_title: 'NATO Science Series II: Mathematics, Physics and Chemistry'
status: public
title: Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films
  with Sub-Nanometer Single Layers
type: book_chapter
user_id: '245590'
year: '2006'
...
---
_id: '3537'
author:
- first_name: Kostadinka
  full_name: Gesheva, Kostadinka
  last_name: Gesheva
- first_name: Tatyana
  full_name: Ivanova, Tatyana
  last_name: Ivanova
- first_name: Frank
  full_name: Hamelmann, Frank
  id: '208487'
  last_name: Hamelmann
  orcid: 0000-0001-6141-9874
- first_name: Oleg
  full_name: Trofimov, Oleg
  last_name: Trofimov
citation:
  alphadin: '<span style="font-variant:small-caps;">Gesheva, Kostadinka</span> ; <span
    style="font-variant:small-caps;">Ivanova, Tatyana</span> ; <span style="font-variant:small-caps;">Hamelmann,
    Frank</span> ; <span style="font-variant:small-caps;">Trofimov, Oleg</span>: Cvd-Transition
    Metal Oxide Films As Functional Layers in “Smart Windows” and X-Ray Mirrors. In:
    <span style="font-variant:small-caps;">Kassing, R.</span> ; <span style="font-variant:small-caps;">Petkov,
    P.</span> ; <span style="font-variant:small-caps;">Kulisch, W.</span> ; <span
    style="font-variant:small-caps;">Popov, C.</span> (Hrsg.): <i>Functional Properties
    of Nanostructured Materials</i>, <i>NATO Science Series II: Mathematics, Physics
    and Chemistry</i>. Dordrecht : Springer Netherlands, 2006, S. 341–349'
  ama: 'Gesheva K, Ivanova T, Hamelmann F, Trofimov O. Cvd-Transition Metal Oxide
    Films As Functional Layers in “Smart Windows” and X-Ray Mirrors. In: Kassing R,
    Petkov P, Kulisch W, Popov C, eds. <i>Functional Properties of Nanostructured
    Materials</i>. NATO Science Series II: Mathematics, Physics and Chemistry. Dordrecht:
    Springer Netherlands; 2006:341-349. doi:<a href="https://doi.org/10.1007/1-4020-4594-8_26">10.1007/1-4020-4594-8_26</a>'
  apa: 'Gesheva, K., Ivanova, T., Hamelmann, F., &#38; Trofimov, O. (2006). Cvd-Transition
    Metal Oxide Films As Functional Layers in “Smart Windows” and X-Ray Mirrors. In
    R. Kassing, P. Petkov, W. Kulisch, &#38; C. Popov (Eds.), <i>Functional Properties
    of Nanostructured Materials</i> (pp. 341–349). Dordrecht: Springer Netherlands.
    <a href="https://doi.org/10.1007/1-4020-4594-8_26">https://doi.org/10.1007/1-4020-4594-8_26</a>'
  bibtex: '@inbook{Gesheva_Ivanova_Hamelmann_Trofimov_2006, place={Dordrecht}, series={NATO
    Science Series II: Mathematics, Physics and Chemistry}, title={Cvd-Transition
    Metal Oxide Films As Functional Layers in “Smart Windows” and X-Ray Mirrors},
    DOI={<a href="https://doi.org/10.1007/1-4020-4594-8_26">10.1007/1-4020-4594-8_26</a>},
    booktitle={Functional Properties of Nanostructured Materials}, publisher={Springer
    Netherlands}, author={Gesheva, Kostadinka and Ivanova, Tatyana and Hamelmann,
    Frank and Trofimov, Oleg}, editor={Kassing, Rainer and Petkov, Plamen and Kulisch,
    Wilhelm and Popov, CyrilEditors}, year={2006}, pages={341–349}, collection={NATO
    Science Series II: Mathematics, Physics and Chemistry} }'
  chicago: 'Gesheva, Kostadinka, Tatyana Ivanova, Frank Hamelmann, and Oleg Trofimov.
    “Cvd-Transition Metal Oxide Films As Functional Layers in ‘Smart Windows’ and
    X-Ray Mirrors.” In <i>Functional Properties of Nanostructured Materials</i>, edited
    by Rainer Kassing, Plamen Petkov, Wilhelm Kulisch, and Cyril Popov, 341–49. NATO
    Science Series II: Mathematics, Physics and Chemistry. Dordrecht: Springer Netherlands,
    2006. <a href="https://doi.org/10.1007/1-4020-4594-8_26">https://doi.org/10.1007/1-4020-4594-8_26</a>.'
  ieee: 'K. Gesheva, T. Ivanova, F. Hamelmann, and O. Trofimov, “Cvd-Transition Metal
    Oxide Films As Functional Layers in ‘Smart Windows’ and X-Ray Mirrors,” in <i>Functional
    Properties of Nanostructured Materials</i>, R. Kassing, P. Petkov, W. Kulisch,
    and C. Popov, Eds. Dordrecht: Springer Netherlands, 2006, pp. 341–349.'
  mla: Gesheva, Kostadinka, et al. “Cvd-Transition Metal Oxide Films As Functional
    Layers in ‘Smart Windows’ and X-Ray Mirrors.” <i>Functional Properties of Nanostructured
    Materials</i>, edited by Rainer Kassing et al., Springer Netherlands, 2006, pp.
    341–49, doi:<a href="https://doi.org/10.1007/1-4020-4594-8_26">10.1007/1-4020-4594-8_26</a>.
  short: 'K. Gesheva, T. Ivanova, F. Hamelmann, O. Trofimov, in: R. Kassing, P. Petkov,
    W. Kulisch, C. Popov (Eds.), Functional Properties of Nanostructured Materials,
    Springer Netherlands, Dordrecht, 2006, pp. 341–349.'
date_created: 2023-09-01T09:17:42Z
date_updated: 2026-03-17T15:28:46Z
doi: 10.1007/1-4020-4594-8_26
editor:
- first_name: Rainer
  full_name: Kassing, Rainer
  last_name: Kassing
- first_name: Plamen
  full_name: Petkov, Plamen
  last_name: Petkov
- first_name: Wilhelm
  full_name: Kulisch, Wilhelm
  last_name: Kulisch
- first_name: Cyril
  full_name: Popov, Cyril
  last_name: Popov
language:
- iso: eng
page: 341-349
place: Dordrecht
publication: Functional Properties of Nanostructured Materials
publication_identifier:
  eisbn:
  - 978-1-4020-4594-3
  isbn:
  - 978-1-4020-4595-0
  issn:
  - 1568-2609
publication_status: published
publisher: Springer Netherlands
series_title: 'NATO Science Series II: Mathematics, Physics and Chemistry'
status: public
title: Cvd-Transition Metal Oxide Films As Functional Layers in “Smart Windows” and
  X-Ray Mirrors
type: book_chapter
user_id: '216459'
year: '2006'
...