@inproceedings{4675,
  author       = {Weber, Lennart and Fromme, Lars and Zielke, Dirk},
  booktitle    = {Proceedings COMSOL Conference 2016},
  isbn         = {978-0-9910001-3-5},
  location     = {Munich},
  title        = {{3D Simulation of an Acceleration Sensor with Self-sufficient Energy Supply}},
  doi          = {10.57720/4675},
  year         = {2016},
}