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Gesheva, Vacuum 76 (2004) 139–142.","alphadin":"<span style=\"font-variant:small-caps;\">Hamelmann, Frank</span> ; <span style=\"font-variant:small-caps;\">Aschentrup, A.</span> ; <span style=\"font-variant:small-caps;\">Brechling, A.</span> ; <span style=\"font-variant:small-caps;\">Heinzmann, U.</span> ; <span style=\"font-variant:small-caps;\">Abrashev, M.</span> ; <span style=\"font-variant:small-caps;\">Szekeres, A.</span> ; <span style=\"font-variant:small-caps;\">Gesheva, K.</span>: Plasma-assisted deposition of thin carbon films from methane and the influence of the plasma parameters and additional gases. In: <i>Vacuum</i> Bd. 76, Elsevier BV (2004), Nr. 2–3, S. 139–142","apa":"Hamelmann, F., Aschentrup, A., Brechling, A., Heinzmann, U., Abrashev, M., Szekeres, A., &#38; Gesheva, K. (2004). Plasma-assisted deposition of thin carbon films from methane and the influence of the plasma parameters and additional gases. <i>Vacuum</i>, <i>76</i>(2–3), 139–142. <a href=\"https://doi.org/10.1016/j.vacuum.2004.07.074\">https://doi.org/10.1016/j.vacuum.2004.07.074</a>","bibtex":"@article{Hamelmann_Aschentrup_Brechling_Heinzmann_Abrashev_Szekeres_Gesheva_2004, title={Plasma-assisted deposition of thin carbon films from methane and the influence of the plasma parameters and additional gases}, volume={76}, DOI={<a href=\"https://doi.org/10.1016/j.vacuum.2004.07.074\">10.1016/j.vacuum.2004.07.074</a>}, number={2–3}, journal={Vacuum}, publisher={Elsevier BV}, author={Hamelmann, Frank and Aschentrup, A. and Brechling, A. and Heinzmann, U. and Abrashev, M. and Szekeres, A. and Gesheva, K.}, year={2004}, pages={139–142} }","ieee":"F. Hamelmann <i>et al.</i>, “Plasma-assisted deposition of thin carbon films from methane and the influence of the plasma parameters and additional gases,” <i>Vacuum</i>, vol. 76, no. 2–3, pp. 139–142, 2004."},"author":[{"full_name":"Hamelmann, Frank","orcid":"0000-0001-6141-9874","last_name":"Hamelmann","id":"208487","first_name":"Frank"},{"last_name":"Aschentrup","full_name":"Aschentrup, A.","first_name":"A."},{"full_name":"Brechling, A.","last_name":"Brechling","first_name":"A."},{"first_name":"U.","last_name":"Heinzmann","full_name":"Heinzmann, U."},{"first_name":"M.","full_name":"Abrashev, M.","last_name":"Abrashev"},{"first_name":"A.","full_name":"Szekeres, A.","last_name":"Szekeres"},{"full_name":"Gesheva, K.","last_name":"Gesheva","first_name":"K."}],"status":"public"}]