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Fabrication of aluminum electrodes by water and light. <i>Journal of Micromechatronics</i>, <i>2</i>(3), 215–225. <a href=\"https://doi.org/10.1163/156856304773954296\">https://doi.org/10.1163/156856304773954296</a>","bibtex":"@article{Haefliger_Cahill_Stemmer_2002, title={Fabrication of aluminum electrodes by water and light}, volume={2}, DOI={<a href=\"https://doi.org/10.1163/156856304773954296\">10.1163/156856304773954296</a>}, number={3}, journal={Journal of Micromechatronics}, publisher={Walter de Gruyter GmbH}, author={Haefliger, Daniel and Cahill, Brian and Stemmer, Andreas}, year={2002}, pages={215–225} }","short":"D. Haefliger, B. Cahill, A. 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