{"author":[{"id":"208487","last_name":"Hamelmann","first_name":"Frank","full_name":"Hamelmann, Frank"},{"full_name":"Wonisch, A.","last_name":"Wonisch","first_name":"A."},{"full_name":"Hachmann, W.","last_name":"Hachmann","first_name":"W."},{"full_name":"Heinzmann, U.","first_name":"U.","last_name":"Heinzmann"}],"user_id":"245590","publication_status":"published","page":"351-354","date_updated":"2023-09-06T13:34:59Z","language":[{"iso":"eng"}],"title":"Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers","publisher":"Springer Netherlands","publication":"Functional Properties of Nanostructured Materials","year":"2006","citation":{"alphadin":"<span style=\"font-variant:small-caps;\">Hamelmann, Frank</span> ; <span style=\"font-variant:small-caps;\">Wonisch, A.</span> ; <span style=\"font-variant:small-caps;\">Hachmann, W.</span> ; <span style=\"font-variant:small-caps;\">Heinzmann, U.</span>: Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. In: <span style=\"font-variant:small-caps;\">Kassing, R.</span> ; <span style=\"font-variant:small-caps;\">Petkov, P.</span> ; <span style=\"font-variant:small-caps;\">Kulisch, W.</span> ; <span style=\"font-variant:small-caps;\">Popov, C.</span> (Hrsg.): <i>Functional Properties of Nanostructured Materials</i>, <i>NATO Science Series II: Mathematics, Physics and Chemistry</i>. Dordrecht : Springer Netherlands, 2006, S. 351–354","chicago":"Hamelmann, Frank, A. Wonisch, W. Hachmann, and U. Heinzmann. “Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers.” In <i>Functional Properties of Nanostructured Materials</i>, edited by Rainer Kassing, Plamen Petkov, Wilhelm Kulisch, and Cyril Popov, 351–54. NATO Science Series II: Mathematics, Physics and Chemistry. Dordrecht: Springer Netherlands, 2006. <a href=\"https://doi.org/10.1007/1-4020-4594-8_27\">https://doi.org/10.1007/1-4020-4594-8_27</a>.","mla":"Hamelmann, Frank, et al. “Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers.” <i>Functional Properties of Nanostructured Materials</i>, edited by Rainer Kassing et al., Springer Netherlands, 2006, pp. 351–54, doi:<a href=\"https://doi.org/10.1007/1-4020-4594-8_27\">10.1007/1-4020-4594-8_27</a>.","ieee":"F. Hamelmann, A. Wonisch, W. Hachmann, and U. Heinzmann, “Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers,” in <i>Functional Properties of Nanostructured Materials</i>, R. Kassing, P. Petkov, W. Kulisch, and C. Popov, Eds. Dordrecht: Springer Netherlands, 2006, pp. 351–354.","short":"F. Hamelmann, A. Wonisch, W. Hachmann, U. Heinzmann, in: R. Kassing, P. Petkov, W. Kulisch, C. Popov (Eds.), Functional Properties of Nanostructured Materials, Springer Netherlands, Dordrecht, 2006, pp. 351–354.","bibtex":"@inbook{Hamelmann_Wonisch_Hachmann_Heinzmann_2006, place={Dordrecht}, series={NATO Science Series II: Mathematics, Physics and Chemistry}, title={Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers}, DOI={<a href=\"https://doi.org/10.1007/1-4020-4594-8_27\">10.1007/1-4020-4594-8_27</a>}, booktitle={Functional Properties of Nanostructured Materials}, publisher={Springer Netherlands}, author={Hamelmann, Frank and Wonisch, A. and Hachmann, W. and Heinzmann, U.}, editor={Kassing, Rainer and Petkov, Plamen and Kulisch, Wilhelm and Popov, CyrilEditors}, year={2006}, pages={351–354}, collection={NATO Science Series II: Mathematics, Physics and Chemistry} }","apa":"Hamelmann, F., Wonisch, A., Hachmann, W., &#38; Heinzmann, U. (2006). Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. In R. Kassing, P. Petkov, W. Kulisch, &#38; C. Popov (Eds.), <i>Functional Properties of Nanostructured Materials</i> (pp. 351–354). Dordrecht: Springer Netherlands. <a href=\"https://doi.org/10.1007/1-4020-4594-8_27\">https://doi.org/10.1007/1-4020-4594-8_27</a>","ama":"Hamelmann F, Wonisch A, Hachmann W, Heinzmann U. Plasma Assisted Deposition of Tungsten Oxide / Silicon Oxide Multilayer Films with Sub-Nanometer Single Layers. In: Kassing R, Petkov P, Kulisch W, Popov C, eds. <i>Functional Properties of Nanostructured Materials</i>. NATO Science Series II: Mathematics, Physics and Chemistry. Dordrecht: Springer Netherlands; 2006:351-354. doi:<a href=\"https://doi.org/10.1007/1-4020-4594-8_27\">10.1007/1-4020-4594-8_27</a>"},"_id":"3536","place":"Dordrecht","series_title":"NATO Science Series II: Mathematics, Physics and Chemistry","publication_identifier":{"issn":["1568-2609"],"isbn":["978-1-4020-4595-0"],"eisbn":["978-1-4020-4594-3"]},"main_file_link":[{"url":"https://link.springer.com/chapter/10.1007/1-4020-4594-8_27"}],"type":"book_chapter","date_created":"2023-09-01T09:16:56Z","doi":"10.1007/1-4020-4594-8_27","editor":[{"first_name":"Rainer","last_name":"Kassing","full_name":"Kassing, Rainer"},{"first_name":"Plamen","last_name":"Petkov","full_name":"Petkov, Plamen"},{"full_name":"Kulisch, Wilhelm","first_name":"Wilhelm","last_name":"Kulisch"},{"first_name":"Cyril","last_name":"Popov","full_name":"Popov, Cyril"}],"status":"public"}