{"date_updated":"2025-07-01T11:01:46Z","author":[{"last_name":"Haefliger","first_name":"Daniel","full_name":"Haefliger, Daniel"},{"orcid":"0000-0002-7325-5114","id":"257249","full_name":"Cahill, Brian","orcid_put_code_url":"https://api.orcid.org/v2.0/0000-0002-7325-5114/work/187030864","last_name":"Cahill","first_name":"Brian"},{"first_name":"Andreas","last_name":"Stemmer","full_name":"Stemmer, Andreas"}],"type":"journal_article","publication_identifier":{"eissn":["1568-5632"],"issn":["1389-2258"]},"status":"public","volume":2,"page":"215-225","publication":"Journal of Micromechatronics","publisher":"Walter de Gruyter GmbH","main_file_link":[{"url":"https://brill.com/view/journals/jmm/2/3-4/article-p215.xml?rskey=62otks&result=1&ebody=previewPdf-130794"}],"year":"2002","title":"Fabrication of aluminum electrodes by water and light","_id":"6021","language":[{"iso":"eng"}],"citation":{"short":"D. Haefliger, B. Cahill, A. Stemmer, Journal of Micromechatronics 2 (2002) 215–225.","bibtex":"@article{Haefliger_Cahill_Stemmer_2002, title={Fabrication of aluminum electrodes by water and light}, volume={2}, DOI={<a href=\"https://doi.org/10.1163/156856304773954296\">10.1163/156856304773954296</a>}, number={3}, journal={Journal of Micromechatronics}, publisher={Walter de Gruyter GmbH}, author={Haefliger, Daniel and Cahill, Brian and Stemmer, Andreas}, year={2002}, pages={215–225} }","chicago":"Haefliger, Daniel, Brian Cahill, and Andreas Stemmer. “Fabrication of Aluminum Electrodes by Water and Light.” <i>Journal of Micromechatronics</i> 2, no. 3 (2002): 215–25. <a href=\"https://doi.org/10.1163/156856304773954296\">https://doi.org/10.1163/156856304773954296</a>.","alphadin":"<span style=\"font-variant:small-caps;\">Haefliger, Daniel</span> ; <span style=\"font-variant:small-caps;\">Cahill, Brian</span> ; <span style=\"font-variant:small-caps;\">Stemmer, Andreas</span>: Fabrication of aluminum electrodes by water and light. In: <i>Journal of Micromechatronics</i> Bd. 2, Walter de Gruyter GmbH (2002), Nr. 3, S. 215–225","apa":"Haefliger, D., Cahill, B., &#38; Stemmer, A. (2002). Fabrication of aluminum electrodes by water and light. <i>Journal of Micromechatronics</i>, <i>2</i>(3), 215–225. <a href=\"https://doi.org/10.1163/156856304773954296\">https://doi.org/10.1163/156856304773954296</a>","mla":"Haefliger, Daniel, et al. “Fabrication of Aluminum Electrodes by Water and Light.” <i>Journal of Micromechatronics</i>, vol. 2, no. 3, Walter de Gruyter GmbH, 2002, pp. 215–25, doi:<a href=\"https://doi.org/10.1163/156856304773954296\">10.1163/156856304773954296</a>.","ieee":"D. Haefliger, B. Cahill, and A. Stemmer, “Fabrication of aluminum electrodes by water and light,” <i>Journal of Micromechatronics</i>, vol. 2, no. 3, pp. 215–225, 2002.","ama":"Haefliger D, Cahill B, Stemmer A. Fabrication of aluminum electrodes by water and light. <i>Journal of Micromechatronics</i>. 2002;2(3):215-225. doi:<a href=\"https://doi.org/10.1163/156856304773954296\">10.1163/156856304773954296</a>"},"issue":"3","user_id":"220548","doi":"10.1163/156856304773954296","intvolume":"         2","publication_status":"published","date_created":"2025-06-27T11:24:54Z"}