Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water
D. Haefliger, B. Cahill, A. Stemmer, Microelectronic Engineering 67–68 (2003) 473–478.
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Artikel
| Veröffentlicht
| Englisch
Autor*in
Haefliger, D.;
Cahill, Brian
;
Stemmer, A.
;
Stemmer, A.Erscheinungsjahr
Zeitschriftentitel
Microelectronic Engineering
Band
67-68
Seite
473-478
ISSN
FH-PUB-ID
Zitieren
Haefliger, D. ; Cahill, Brian ; Stemmer, A.: Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. In: Microelectronic Engineering Bd. 67–68, Elsevier BV (2003), S. 473–478
Haefliger D, Cahill B, Stemmer A. Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. Microelectronic Engineering. 2003;67-68:473-478. doi:10.1016/S0167-9317(03)00103-5
Haefliger, D., Cahill, B., & Stemmer, A. (2003). Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. Microelectronic Engineering, 67–68, 473–478. https://doi.org/10.1016/S0167-9317(03)00103-5
@article{Haefliger_Cahill_Stemmer_2003, title={Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water}, volume={67–68}, DOI={10.1016/S0167-9317(03)00103-5}, journal={Microelectronic Engineering}, publisher={Elsevier BV}, author={Haefliger, D. and Cahill, Brian and Stemmer, A.}, year={2003}, pages={473–478} }
Haefliger, D., Brian Cahill, and A. Stemmer. “Rapid Prototyping of Micro-Electrodes on Glass and Polymers by Laser-Assisted Corrosion of Aluminum Films in Water.” Microelectronic Engineering 67–68 (2003): 473–78. https://doi.org/10.1016/S0167-9317(03)00103-5.
D. Haefliger, B. Cahill, and A. Stemmer, “Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water,” Microelectronic Engineering, vol. 67–68, pp. 473–478, 2003.
Haefliger, D., et al. “Rapid Prototyping of Micro-Electrodes on Glass and Polymers by Laser-Assisted Corrosion of Aluminum Films in Water.” Microelectronic Engineering, vol. 67–68, Elsevier BV, 2003, pp. 473–78, doi:10.1016/S0167-9317(03)00103-5.
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