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2003 | Artikel | FH-PUB-ID: 6020
Haefliger D, Cahill B, Stemmer A. Rapid prototyping of micro-electrodes on glass and polymers by laser-assisted corrosion of aluminum films in water. Microelectronic Engineering. 2003;67-68:473-478. doi:10.1016/S0167-9317(03)00103-5
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