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3 Publikationen


2004 | Artikel | FH-PUB-ID: 3542
F. Hamelmann et al., “Thin molybdenum oxide films produced by molybdenum pentacarbonyl 1-methylbutylisonitrile with plasma-assisted chemical vapor deposition,” Thin Solid Films, vol. 446, no. 2, pp. 167–171, 2004.
HSBI-PUB | DOI
 

2000 | Artikel | FH-PUB-ID: 3550
F. Hamelmann et al., “Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD,” Thin Solid Films, vol. 358, no. 1–2, pp. 90–93, 2000.
HSBI-PUB | DOI
 

1999 | Artikel | FH-PUB-ID: 3553
F. Hamelmann et al., “W/Si multilayers deposited by hot-filament MOCVD,” Thin Solid Films, vol. 338, no. 1–2, pp. 70–74, 1999.
HSBI-PUB | DOI
 

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Zitationsstil: IEEE

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