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3 Publikationen
2004 | Artikel | FH-PUB-ID: 3542
Hamelmann, Frank, et al. “Thin Molybdenum Oxide Films Produced by Molybdenum Pentacarbonyl 1-Methylbutylisonitrile with Plasma-Assisted Chemical Vapor Deposition.” Thin Solid Films, vol. 446, no. 2, Elsevier BV, 2004, pp. 167–71, doi:10.1016/j.tsf.2003.09.045.
HSBI-PUB
| DOI
2000 | Artikel | FH-PUB-ID: 3550
Hamelmann, Frank, et al. “Metal Oxide/Silicon Oxide Multilayer with Smooth Interfaces Produced by in Situ Controlled Plasma-Enhanced MOCVD.” Thin Solid Films, vol. 358, no. 1–2, Elsevier BV, 2000, pp. 90–93, doi:10.1016/S0040-6090(99)00695-1.
HSBI-PUB
| DOI
1999 | Artikel | FH-PUB-ID: 3553
Hamelmann, Frank, et al. “W/Si Multilayers Deposited by Hot-Filament MOCVD.” Thin Solid Films, vol. 338, no. 1–2, Elsevier BV, 1999, pp. 70–74, doi:10.1016/S0040-6090(98)00996-1.
HSBI-PUB
| DOI